• 产品名称: 5"滑动法兰1200℃三温区CVD系统--OTF-1200X-5-III-SF
  • 产品编号: OTF1200X-5-III-SF
  • 产品提示: 图片及数据仅供参考,具体请致电销售热线
  • 产品型号:

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OTF1200X-5-III-SF is a CE certified split 5" (O.D) three-zone tube furnace, which can achieve faster heating up to 1200oC and create a different thermal gradient by adjust three zone temperature. The furnace includes all accessories for immediate use. It is an excellent furnace for annealing, diffusing and sintering sample in various atmospheres.
  • One 5" O.D x 1400mm L fused quartz tube and one pair of vacuum sealing flanges with pressure gauge.
  • Three 30 segments temperature controllers are installed with K type thermal couple. Microprocessor-based self-tuning PID control provides excellent control without overshootingand +/- 1 oC accuracy. 
  • 800mm long sliding rail is installed with one end flange to make loading & unload sample at easy.
  • Two mobile carts are included to support furnace and sliding rail.
  • Three flowmeters (range: 0-100 ml/min, 0-160 ml/min, 0-250 ml/min) are installed in one of mobile cart, which allow to use three types of gas during heat treatment.
  • One mechanical pump with KF25 adaptor and SS pipe are included with furnace.
  • One digital vacuum gauge is installed on the flange for easy vacuum pressure reading upto10 -4 torr.
  • Click picture below to enlarge and to see details. 

 

digital vacuum gauge,
 SS vacuum pipe & ball
valve with KF25 adaptor 
 garantee 10-2 torr vacuum
 
2" Quartz boat sitting on the
slide rail holder is ready used
for diffusion, oxidation and anneal.
5" Quartz tube can
accommodate 4" quartz
wafer boat without  holder.
Specifications:
 

Furnace structure

  • Double layer steel case with two cooling fan, which ensures low surface temperature.
  • Energy saving high purity fibrous alumina insulation.
  • 内炉膛表面涂有美国进口的高温氧化铝涂层可以提高设备的加热效率,同时也可以延长炉膛的使用寿命
  • One flange is supported by sliding rail to make sample loading /unloading easy, and another seal flange is installed with a digital vacuum gauge.
  • One Double Steps Rotary Vane High Speed Vacuum Pump (240 L/m) with Oil is included. 

 Voltage & Power

  • AC 208-240V Single Phase, 50/60 Hz  (40A breaker required).
  • Powder cord is included without plug.
  • 7 KW Max.

 Max. Temperature

 1200 oC

 Continuous Temperature

 1100 oC

 Max. Heating Rate

 <= 20 oC /min

 Tube Size and Flange

  • 125 mm O.D x 120 mm ID. x 1400 mm fused quartz tube included.
  • Vacuum flanges with valves and pressure gauge are included.  Click picture below to see details.

 Heating Zone Length

Three zones: (900mm, 36" in total)
 

  • Zone 1: 229mm  (9")
     
  • Zone 2: 457mm  (18.0")
     
  • Zone 3: 229 mm (9")

Constant Temp. Zone

  • If set three zone at same temperature, constant temperature zone is 25" (625 mm) length within +/- 1oC
  • If using one zone (center zone),  constant temperature zone is 4.3" (110 mm) length within +/- 1oC

 Temperature Controllers

  • Three Digital Controllers, and each has 30-segement 
  • Built in protection from over-heated and broken thermo couple

 Temperature Accuracy

 +/- 1oC

 Heating Element

 Fe-Cr-Al Alloy doped by Mo

 Dimension

 1080 X 430 x 600mm

 Net Weight

 about 70 kg

 Warranty & Certificate

  • One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.)
  •  CE Certificate

Shipping package size after crating

 65x45x35" ( x2)

Shipping weight

 540 lbs

 Mobile Cart & Flow meters
 
  • Gas mixing controls with three floating meters(range: 0-100 ml/min, 0-160 ml/min, 0-250 ml/min) are installed on one cart that allows three types of gases to operate during heating treatment.( click picture below left to see detail specs)
  • Two mobile carts are included to allow flange sliding onthe table
  • Optional:  for precision gas control, you may choose digital mass flow Control system instaed of float-meter at extra cost ( click picture below to see details )
                              
3 Channels Float-meter gas control      3 channels MFC gas control (optional)
 

 Operation Manual    Download Catalog       About shipping / Handling    Quick test instruction

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