中美合资 合肥科晶材料技术有限公司-管式炉,马弗炉,高温炉,单晶基片,靶材,箱式炉,气氛炉,CVD管式炉,PECVD系统....


 
科晶新品
根据应用寻找设备
根据应用寻找晶体
-- A-Z晶体及材料 --
A-Z系列晶体
A-Z系列靶材
A-Z系列蒸发料
A-Z系列薄膜
A-Z系列金属丝箔 
A-Z系列粉料 
陶瓷玻璃及其他基片
晶体包装材料及工具
功能纳米材料
-- 加热炉系列 --
箱式炉
管式炉
混合箱/管式炉
高通量炉
CVD系统
氢气炉/高温高压炉
RTP快速退火炉
熔炼/铸造系列
晶体生长炉
工业炉
烘箱/真空储存箱
加热炉配件及耗材
-- 薄膜制备设备 --
等离子镀膜设备
蒸发镀膜设备
流延涂覆设备
化学气相沉积薄膜设备
静电纺丝/喷涂设备
丝印涂覆设备
旋涂/提拉涂覆设备
薄膜检测设备
-- 样品处理设备 --
混料、球磨系列设备
实验室压机/辊压机
清洗机设备
切割设备
研磨抛光设备
-- 电池研发全套设备 --
扣式电池研发设备
柱状电池研发设备
软包电池研发设备
超越锂电/固态电池
太阳能电池/燃料电池
电池测试设备
电池研发材料
-- 其他实验室设备 --
供气系统
真空系统
手套箱
检测设备
水冷机
电子天平
配件耗材

        • 产品名称: 1700°C九通道混气高真空CVD系统-GSL-1700X-HVC9
        • 产品提示: 图片及数据仅供参考,具体请致电销售热线
        • 产品型号:

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            GSL-1700X-HVC9 is CE certified 80mm diameter alumina tube furnace with vacuum pump system (up to 10-5 torr) and 9 channel precision digital Mass flow-meters, which can control nine types of gases for CVD or diffusion and work up to 1700oC.


         技术参数

        Furnace Structure

         

         Power

             6 Kw

        Voltage

             AC 208-240V Single Phase, 50/60 Hz

        Heating Element      8 pcs1800oC grade MoSi2 heating element

        Max. Temperature

            1700 oC (< 1 hours )

        Continuous Temperature

            1600 oC

         Max. Heating Rate

             ≤5  oC /min

         Tube Size and Materials

        • Premier Grade alumina tube made in USA.

        • (标配尺寸) ( 60mm) O.D.x I.D. (54mm) x 1000mm Length

        • (选配尺寸) ( 80mm) O.D.x I.D. (74mm) x  1000mm Length 

        • Two pairs of SS tune support is installed to avoid tube bending under high temperature (click picture below to see details).

         

         Heating Zone

        • Heating zone length: 457 mm (18")

        • Constant Temperature Zone length: 150 mm (6")(+/-1oC) 注:由于测量手段及外部环境的影响,测量结果可能会有偏差,此参数仅供参考不作为该设备的技术指标。您购买产品需要准确的恒温区数据,请与我公司销售人员联系 

        Temperature controllers
        • One precision digital temperature controller programmable with 50 segments.

        • PID adjustable with auto tune function to ensure temperature stability within  +/- 1 oC.    

        • 控温仪表操作视频

        • Full protection in each controller for over-temperature and broken thermal couple.

        Thermal Couple

             B type thermal couples built in

        Vacuum Flanges

         

        • Two stainless steel flanges with vacuum hose and gas fitting pipe. One flange is installed with KFD-40 adaptor and ball valve.
        • Double high temperature silicone O-ring for using under 300oC.
        • Porous alumina blocks included for protecting flange from heat radiation.

        Vacuum pumps

             Tow stages vacuum pump installed in bottom case:

        Vacuum Sensor & display

        • Vacuum sensor is installed to vacuum flange on tube furnace, and connect to a digital vacuum pressure display.

        • Vacuum controller and display areinstalled in bottom mobile cart.

        Gas flow meter

        User Manual (Click to download)
         
         
         
        • 9 precision mass flow meters (CS200) controllers are installed in bottom mobile cart with digital display panel of+/-1% of Full Scale (accuracy is within 35%-100% of full scale)
          • 3 MFC at range 0 - 1000scc
          • 3 MFC at range 0 - 200scc
          • 3 MFC at range 0 - 10 scc
          • one floating meter will be installed for N2 gas only
        • one mechanical pressure meters are installed in bottom mobile cart for monitor each gas 's pressure in mixer.
        • 9mass flow MFC control panels/displays with dial button to adjust gas flow rate. Please see picture below.

          Software and interface (optional at extra cost).  Please click uderline for software operation instruction
                  
                  
         
        Pipe connection,  valves and gas mixer

        • SS 316 1/4" pipe/fitting
        • SS 316 vacuum needle valves
        • 21 sets of stainless steel vacuum valves are installed outside of  right side panel of mobile cabinet to control, vacuum pump, flowing gases and two inlet gases separately.
        • Please click here to see sketch of pipe connection.

         Dimension

              Furnace: 550 x 380 x 520  Bottom Mobile case: 600x600x597

         Net Weight

              about 100 kg

        Shipping weight

              200 Lbs 

        Shipping package size after crating

              Two cases in one plastic pallet: 45x45x35/case

         Warranty & certificate

        • One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.)
        • CE Certificate

         Operation Manual  Download Catalog    About shipping / Handling     Quick test instruction

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