中美合资 合肥科晶材料技术有限公司-管式炉,马弗炉,高温炉,单晶基片,靶材,箱式炉,气氛炉,CVD管式炉,PECVD系统....


 
科晶新品
根据应用寻找设备
根据应用寻找晶体
-- A-Z晶体及材料 --
A-Z系列晶体
A-Z系列靶材
A-Z系列蒸发料
A-Z系列薄膜
A-Z系列金属丝箔 
A-Z系列粉料 
陶瓷玻璃及其他基片
晶体包装材料及工具
功能纳米材料
-- 加热炉系列 --
箱式炉
管式炉
混合箱/管式炉
高通量炉
CVD系统
高温高压炉
氢气炉
RTP快速退火炉
熔炼/铸造系列
晶体生长炉
工业炉
加热烘箱
加热炉配件及耗材
-- 薄膜制备设备 --
提拉涂覆设备
丝印涂覆设备
流延涂覆设备
旋转涂覆设备
等离子镀膜设备
蒸发镀膜设备
化学气相沉积设备
静电纺丝、热喷涂设备
小型冷喷涂设备
薄膜检测设备
-- 样品处理设备 --
混料、球磨系列设备
实验室压片机
辊压机
清洗机设备
切割设备
研磨抛光设备
-- 电池研发全套设备 --
扣式电池研发设备
柱状电池研发设备
软包电池研发设备
锂空电池研发设备
钙钛矿电池研发设备
固态锂离子电池研发设备
液流电池研发设备
燃料电池研发设备
电池测试设备
电池研发材料
-- 其他实验室设备 --
供气系统
真空系统
手套箱
检测设备
水冷机
电子天平
配件耗材
真空储藏箱

        • 产品名称: 1200°C九通道混气高真空CVD系统--OTF-1200X-4-III-9HV
        • 产品提示: 图片及数据仅供参考,具体请致电销售热线
        • 产品型号:

        下载附件:

            OTF-1200X-4-III-9HV is CE certifed 4" diameter split three zone tube furnace with vacuum pump system (up to 10-5 torr) and 9 channel precision digital Mass flow-meters, which can control nine types of gases for CVD or diffusion.

        Specifications:

         Furnace Structure

        • Double layer steel casing with air cooling.
        • High purity alumia fiber board liner for energy cost effective operation.
        • Three heating zones with in depend temperature control.
        • Vacuum and gas mixing system is located in bottom Mobile cart with 4 wheel.
         Power

         7 Kw

        Voltage

         AC 208-240V Single Phase, 50/60 Hz

        Heating Element Fe-Cr-Al Alloy doped by Mo

        Max. Temperature

         1200 oC

        Continuous Temperature

         1100 oC

         Max. Heating Rate

         <= 20  oC /min

         Tube Size and Materials

         100 mm O.D x 92 mm ID. x 1400 mm fused quartz tube included

         Heating Zone length

         Three zones:   (880mm,  35" in total)

         Zone 1: 220 mm + Zone 2:  440 mm + Zone 3: 220 mm 

        Constant temperature zone  20" (500 mm) length (three zone at equal temperature within +/- 1oC)

        Temperature controllers

        • Three precision digital temperature controllers programmable with 50 segments, which control each heating zone separately.

        • PID adjustable with auto tune function to ensure temperature stability within  +/ - 1 oC.

        • Full protection in each controller for over-temperature and broken thermal couple.

        • Please click here to download operation manual.

         Operation Manual    

        Thermal Couple

          Three K type thermal couples built in

         Vacuum Flanges

         

        • Two stainless steel flanges with vacuum hose and gas fitting pipe.
        • Double high temperature silicone O-ring for using under 300oC.
        • Porous alumina blocks included for protecting flange from heat radiation.

        Vacuum pumps

        Tow stages vacuum pump installed in bottom case:

        Vacuum Sensor & display

        • Vacuum sensor is installed to vacuum flange on tube furnace, and connect to a digital vacuum pressure display.

        • Vacuum controller and display areinstalled in bottom mobile cart.

        Gas flow meter

        ( click to enlarge )

        User Manual (Click to download)
         
        software(click to download)
         
         
        • 9 precision mass flow meters (CS200) controllers are installed in bottom mobile cart with digital display panel of+/-1% of Full Scale (accuracy is within 35% - 100% of full scale).
          • 3 MFC at range 0 - 1000scc
          • 3 MFC at range 0 - 200scc
          • 3 MFC at range 0 - 10 scc
          • one floating meter will be installed for N2 gas only
        • One mechanical pressure meters are installed in bottom mobile cart for monitor each gas 's pressure in mixer.
        • 9 mass flow MFC control panels/displays with dial button to adjust gas flow rate. Please see picture below.
         
              
              
         
        Pipe connection,  valves and gas mixer

        • SS 316 1/4" pipe / fitting.
        • SS316 vacuum needle valves.
        • 21 sets of stainless steel vacuum valves are installed outside of  right side panel of mobile cabinet to control, vacuum pump, flowing gases and two inlet gases separately.
        • Please click here to see sketch of pipe connection.

         Dimension

         Furnace: 550 x 380 x 520  Bottom Mobile case: 800x600x597

         Net Weight

         about 100 kg

        Shipping weight

         350 Lbs 

        Shipping package size after crating

         Two pallets

         Warranty & Certificate

        • One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.)
        • CE Certificate
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