• 产品名称: 1700°C九通道混气高真空CVD系统-GSL-1700X-HVC9
  • 产品编号: GSL-1700X-80-HVC9
  • 产品提示: 图片及数据仅供参考,具体请致电销售热线
  • 产品型号:

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    GSL-1700X-HVC9 is CE certified 80mm diameter alumina tube furnace with vacuum pump system (up to 10-5 torr) and 9 channel precision digital Mass flow-meters, which can control nine types of gases for CVD or diffusion and work up to 1700oC.


 技术参数

Furnace Structure

 

 Power

     6 Kw

Voltage

     AC 208-240V Single Phase, 50/60 Hz

Heating Element      8 pcs1800oC grade MoSi2 heating element

Max. Temperature

    1700 oC (< 1 hours )

Continuous Temperature

    1600 oC

 Max. Heating Rate

     ≤5  oC /min

 Tube Size and Materials

  • Premier Grade alumina tube made in USA.

  • (标配尺寸) ( 60mm) O.D.x I.D. (54mm) x 1000mm Length

  • (选配尺寸) ( 80mm) O.D.x I.D. (74mm) x  1000mm Length 

  • Two pairs of SS tune support is installed to avoid tube bending under high temperature (click picture below to see details).

 

 Heating Zone

  • Heating zone length: 457 mm (18")

  • Constant Temperature Zone length: 150 mm (6")(+/-1oC) 注:由于测量手段及外部环境的影响,测量结果可能会有偏差,此参数仅供参考不作为该设备的技术指标。您购买产品需要准确的恒温区数据,请与我公司销售人员联系 

Temperature controllers
  • One precision digital temperature controller programmable with 50 segments.

  • PID adjustable with auto tune function to ensure temperature stability within  +/- 1 oC.    

  • 控温仪表操作视频

  • Full protection in each controller for over-temperature and broken thermal couple.

Thermal Couple

     B type thermal couples built in

Vacuum Flanges

 

  • Two stainless steel flanges with vacuum hose and gas fitting pipe. One flange is installed with KFD-40 adaptor and ball valve.
  • Double high temperature silicone O-ring for using under 300oC.
  • Porous alumina blocks included for protecting flange from heat radiation.

Vacuum pumps

     Tow stages vacuum pump installed in bottom case:

Vacuum Sensor & display

  • Vacuum sensor is installed to vacuum flange on tube furnace, and connect to a digital vacuum pressure display.

  • Vacuum controller and display areinstalled in bottom mobile cart.

Gas flow meter

User Manual (Click to download)
 
 
 
  • 9 precision mass flow meters (CS200) controllers are installed in bottom mobile cart with digital display panel of+/-1% of Full Scale (accuracy is within 35%-100% of full scale)
    • 3 MFC at range 0 - 1000scc
    • 3 MFC at range 0 - 200scc
    • 3 MFC at range 0 - 10 scc
    • one floating meter will be installed for N2 gas only
  • one mechanical pressure meters are installed in bottom mobile cart for monitor each gas 's pressure in mixer.
  • 9mass flow MFC control panels/displays with dial button to adjust gas flow rate. Please see picture below.

    Software and interface (optional at extra cost).  Please click uderline for software operation instruction
          
          
 
Pipe connection,  valves and gas mixer

  • SS 316 1/4" pipe/fitting
  • SS 316 vacuum needle valves
  • 21 sets of stainless steel vacuum valves are installed outside of  right side panel of mobile cabinet to control, vacuum pump, flowing gases and two inlet gases separately.
  • Please click here to see sketch of pipe connection.

 Dimension

      Furnace: 550 x 380 x 520  Bottom Mobile case: 600x600x597

 Net Weight

      about 100 kg

Shipping weight

      200 Lbs 

Shipping package size after crating

      Two cases in one plastic pallet: 45x45x35/case

 Warranty & certificate

  • One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.)
  • CE Certificate

 Operation Manual  Download Catalog    About shipping / Handling     Quick test instruction

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