• 产品名称: 1200°C九通道混气高真空CVD系统--OTF-1200X-4-III-9HV
  • 产品编号: OTF-1200X -4-III-9HV
  • 产品提示: 图片及数据仅供参考,具体请致电销售热线
  • 产品型号:

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    OTF-1200X-4-III-9HV is CE certifed 4" diameter split three zone tube furnace with vacuum pump system (up to 10-5 torr) and 9 channel precision digital Mass flow-meters, which can control nine types of gases for CVD or diffusion.

Specifications:

 Furnace Structure

  • Double layer steel casing with air cooling.
  • High purity alumia fiber board liner for energy cost effective operation.
  • Three heating zones with in depend temperature control.
  • Vacuum and gas mixing system is located in bottom Mobile cart with 4 wheel.
 Power

 7 Kw

Voltage

 AC 208-240V Single Phase, 50/60 Hz

Heating Element Fe-Cr-Al Alloy doped by Mo

Max. Temperature

 1200 oC

Continuous Temperature

 1100 oC

 Max. Heating Rate

 <= 20  oC /min

 Tube Size and Materials

 100 mm O.D x 92 mm ID. x 1400 mm fused quartz tube included

 Heating Zone length

 Three zones:   (880mm,  35" in total)

 Zone 1: 220 mm + Zone 2:  440 mm + Zone 3: 220 mm 

Constant temperature zone  20" (500 mm) length (three zone at equal temperature within +/- 1oC)

Temperature controllers

  • Three precision digital temperature controllers programmable with 50 segments, which control each heating zone separately.

  • PID adjustable with auto tune function to ensure temperature stability within  +/ - 1 oC.

  • Full protection in each controller for over-temperature and broken thermal couple.

  • Please click here to download operation manual.

 Operation Manual    

Thermal Couple

  Three K type thermal couples built in

 Vacuum Flanges

 

  • Two stainless steel flanges with vacuum hose and gas fitting pipe.
  • Double high temperature silicone O-ring for using under 300oC.
  • Porous alumina blocks included for protecting flange from heat radiation.

Vacuum pumps

Tow stages vacuum pump installed in bottom case:

Vacuum Sensor & display

  • Vacuum sensor is installed to vacuum flange on tube furnace, and connect to a digital vacuum pressure display.

  • Vacuum controller and display areinstalled in bottom mobile cart.

Gas flow meter

( click to enlarge )

User Manual (Click to download)
 
software(click to download)
 
 
  • 9 precision mass flow meters (CS200) controllers are installed in bottom mobile cart with digital display panel of+/-1% of Full Scale (accuracy is within 35% - 100% of full scale).
    • 3 MFC at range 0 - 1000scc
    • 3 MFC at range 0 - 200scc
    • 3 MFC at range 0 - 10 scc
    • one floating meter will be installed for N2 gas only
  • One mechanical pressure meters are installed in bottom mobile cart for monitor each gas 's pressure in mixer.
  • 9 mass flow MFC control panels/displays with dial button to adjust gas flow rate. Please see picture below.
 
      
      
 
Pipe connection,  valves and gas mixer

  • SS 316 1/4" pipe / fitting.
  • SS316 vacuum needle valves.
  • 21 sets of stainless steel vacuum valves are installed outside of  right side panel of mobile cabinet to control, vacuum pump, flowing gases and two inlet gases separately.
  • Please click here to see sketch of pipe connection.

 Dimension

 Furnace: 550 x 380 x 520  Bottom Mobile case: 800x600x597

 Net Weight

 about 100 kg

Shipping weight

 350 Lbs 

Shipping package size after crating

 Two pallets

 Warranty & Certificate

  • One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.)
  • CE Certificate
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